樣(yang)品臺的(de)(de)(de)升(sheng)(sheng)降(jiang)系(xi)統(tong)(tong)(tong)的(de)(de)(de)主要(yao)(yao)指標(biao)包括升(sheng)(sheng)降(jiang)范(fan)(fan)(fan)圍(wei)(wei)或(huo)(huo)稱為(wei)行(xing)(xing)程(cheng)(cheng)范(fan)(fan)(fan)圍(wei)(wei)以及精(jing)度(du)(du)(du)(du)(du)。行(xing)(xing)程(cheng)(cheng)范(fan)(fan)(fan)圍(wei)(wei)與精(jing)度(du)(du)(du)(du)(du)通(tong)常是(shi)一個反相(xiang)關函數。行(xing)(xing)程(cheng)(cheng)越大，螺(luo)距(ju)越大，控制(zhi)精(jing)度(du)(du)(du)(du)(du)也越差。而在(zai)表(biao)面張(zhang)力(li)(li)儀(yi)(yi)的(de)(de)(de)應用于(yu)(yu)(yu)，位移(yi)(yi)(yi)的(de)(de)(de)精(jing)度(du)(du)(du)(du)(du)的(de)(de)(de)重要(yao)(yao)性優于(yu)(yu)(yu)行(xing)(xing)程(cheng)(cheng)范(fan)(fan)(fan)圍(wei)(wei)。具體來說，在(zai)表(biao)面張(zhang)力(li)(li)儀(yi)(yi)中(zhong)，0.1um精(jing)度(du)(du)(du)(du)(du)的(de)(de)(de)系(xi)統(tong)(tong)(tong)優于(yu)(yu)(yu)1um的(de)(de)(de)精(jing)度(du)(du)(du)(du)(du)的(de)(de)(de)升(sheng)(sheng)降(jiang)系(xi)統(tong)(tong)(tong)。而100mm行(xing)(xing)程(cheng)(cheng)范(fan)(fan)(fan)圍(wei)(wei)的(de)(de)(de)1um精(jing)度(du)(du)(du)(du)(du)的(de)(de)(de)系(xi)統(tong)(tong)(tong)比50mm行(xing)(xing)程(cheng)(cheng)范(fan)(fan)(fan)圍(wei)(wei)的(de)(de)(de)0.1um的(de)(de)(de)升(sheng)(sheng)降(jiang)系(xi)統(tong)(tong)(tong)差。更(geng)大的(de)(de)(de)行(xing)(xing)程(cheng)(cheng)范(fan)(fan)(fan)圍(wei)(wei)通(tong)常會導致(zhi)移(yi)(yi)(yi)動時(shi)(shi)間(jian)非常長，因而，對升(sheng)(sheng)降(jiang)系(xi)統(tong)(tong)(tong)的(de)(de)(de)速(su)(su)度(du)(du)(du)(du)(du)的(de)(de)(de)要(yao)(yao)求(qiu)也會有相(xiang)應的(de)(de)(de)提高。但是(shi)，表(biao)面張(zhang)力(li)(li)測試時(shi)(shi)，速(su)(su)度(du)(du)(du)(du)(du)更(geng)慢優于(yu)(yu)(yu)速(su)(su)度(du)(du)(du)(du)(du)快，移(yi)(yi)(yi)動速(su)(su)度(du)(du)(du)(du)(du)0.1mm/s優于(yu)(yu)(yu)1mm/s。所以，控制(zhi)精(jing)度(du)(du)(du)(du)(du)更(geng)高、螺(luo)距(ju)更(geng)小的(de)(de)(de)升(sheng)(sheng)降(jiang)系(xi)統(tong)(tong)(tong)是(shi)關鍵考慮指標(biao)，而非移(yi)(yi)(yi)動范(fan)(fan)(fan)圍(wei)(wei)或(huo)(huo)行(xing)(xing)程(cheng)(cheng)范(fan)(fan)(fan)圍(wei)(wei)或(huo)(huo)zui快的(de)(de)(de)移(yi)(yi)(yi)動速(su)(su)度(du)(du)(du)(du)(du)。在(zai)寫指標(biao)要(yao)(yao)求(qiu)時(shi)(shi)，應該明確螺(luo)距(ju)和控制(zhi)精(jing)度(du)(du)(du)(du)(du)的(de)(de)(de)要(yao)(yao)求(qiu)，而無需把移(yi)(yi)(yi)動范(fan)(fan)(fan)圍(wei)(wei)和速(su)(su)度(du)(du)(du)(du)(du)等(deng)作為(wei)主要(yao)(yao)指標(biao)或(huo)(huo)重點考慮指標(biao)。

例(li)如：如下表格中，后兩(liang)者均是優(you)于前(qian)兩(liang)個指標項的。